Tsunin tururi na jiki (Turawar Turin Jiki, PVD) fasaha tana nufin yin amfani da hanyoyin jiki a ƙarƙashin yanayi mara kyau don vaporation saman tushen abu (mai ƙarfi ko ruwa) zuwa gaseous atom ko kwayoyin, ko wani ɓangare na ionize cikin ions, kuma su wuce ta ƙasa kaɗan. - matsa lamba gas (ko plasma). Tsari, fasaha don ajiye fim na bakin ciki tare da aiki na musamman akan farfajiyar ƙasa, da kuma jigilar tururi na jiki shine ɗayan manyan fasahar jiyya na saman. PVD (jiki tururi ajiya) shafi fasaha aka yafi zuwa kashi uku Categories: injin evaporation shafi, injin sputtering shafi da injin ion shafi.
An fi amfani da samfuran mu a cikin ƙawancen zafi da kuma suturar sputtering. Kayayyakin da ake amfani da su a cikin tururi sun haɗa da waya tungsten strand, tungsten boats, molybdenum boats, da tantalum boats kayayyakin da ake amfani da su a electron katako shafi su ne cathode tungsten waya, jan karfe crucible, tungsten crucible, da molybdenum sarrafa sassa Abubuwan da ake amfani da su a sputtering shafi sun hada da titanium titanium. hari, chromium hari, da titanium-aluminum hari.
